A small Korean firm has developed a perfluorocarbon (PFC) emissions removal device using a catalyst. ECOPRO, an electronic materials manufacturer, succeeded in developing the device for the second time in the world after Hitachi of Japan.
The device can remove more than 99 percent of PFCs using a catalyst. PFCs are environmentally-unfriendly greenhouse gasses that are emitted into the atmosphere in the process of making semiconductors and LCDs. The new equipment needs no additional gadgets to remove NOx, another substance that is emitted when materials are manufactured in temperatures above 1,000 degrees Celsius.
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